Infrared Thermal Micro-imaging

Model VPX-10 is very elaborately designed all-purpose evacuating probe station which can measure device properties according to the variation of temperature (10K ~ 500K) in the vacuum beyond limits of the ambient system. Customers can choose the number of probe arms when the vacuum chamber is assembled onto a lab table from minimum 4 to maximum 6 probe arms. Furthermore, users can comparably measure device properties at the atmospheric pressure and in the high-degree (~10-6 torr) vacuum. Through innovative design of temperature conversion stage can control wide range of stage temperature; fine tuning of LN2 flowing though small tubular type of path, effective temperature transmission via pasted ceramic type chuck which also enhance the temperature transition time and the temperature resolution. Real-time high magnified micro-video system provides clear video information to a user for approaching the micro-tip to the micro-scaled sample electrodes exactly. Images can be zoomed in and out for easy sample loading and unloading. With equipped mass flow control system, internal environmental gas can be controlled easily (optional) as expanding the measuring variables for more various research application.