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AP-200PW 세미-오토메틱 프로브 스테이션

AP-200PW 세미-오토메틱 프로브 스테이션
표준 사양
XY축: 공기 완충 장치(Air suspension) 및 저울(Scale) 장착
  • Stage travel: 210 (x) x 300 (Y) mm
  • Control resolution ability: 0.5 μm
  • Scale resolution ability: 0.1 μm (옵션)
  • Repeatability: within ±0.5 μm
  • Accuracy: within ±20 μm
  • Moving speed: Max. 50 mm/sec.

Z 축
  • Stage travel: 210 (x) x 300 (Y) mm
  • Resolution ability: 1 μm
  • Repeatability: within ±3 μm
  • Moving speed: Max. 25 mm/sec.

T 축
  • Stage travel: 3 degree
  • Resolution ability: 0.001 degree
  • Rolling speed: Max. 1 degree/sec.

Leak Data
▶ Probe Leak
Leak_Data
▶ Chuck Leak
Leak_Data
High Current Probe
High Current Probe
＊ Enables to use with manipulator as well as probe card.
＊ Enables to place many probes as its thin dimension, and it is corresponding to high current by split flow current.

▶ Low contact resistance material probe
It is able to apply high current with small probe tip, so you can do high current measurement for small PAD!

▶ Reference data

Low contact resistance material probe

Probe tip dimension Current level（DC）
25um 2A
50um -
100um -
150um -

Ultra Low contact resistance material probe

Probe tip dimension Current level（DC）
25um 8A
50um 9A
100um 12A
150um 13A
High Current Probe
Hot chuck contact resistance
Hot chuck contact resistance
Test result of High Voltage & High Current
▶ High Voltage

Tested : 10KV voltage supply

Tested : 10KV voltage supply
▶ High Current

Tested：200A supply at Probe－Gold Plate－Chuck

Tested：200A supply at Probe－Gold Plate－Chuck
▶ TEST RESULT
TEST RESULT
▶ TEST RESULT
TEST RESULT
High Voltage Protection (Spark)
High Voltage Protection
High Current Probe card
▶ 200A pulsed Probe card at 300℃
200A pulsed Probe card at 300℃

We used
1, Ceramics PCB for high temperature
2, Ceramics blade for high temperature and high insulator
3, Iridium probe for high current
Special 2000A Probe card
▶ Fig１. Spring pin
Spring pin


▶ Fig2. Picture
Picture
▶ Specification of Spring pin
Item Spec.
Temperature 350℃
Current 5～7A(DC)
Resistance Smaller than50mΩ
Stroke 1.0mm
Spring pressure 11g

▶ TEST report from customer
Item Condition Result
Switching test 300V／40A OK
Avalanche breakdown 1.3kV OK
Break down test 800V／230A(Pulse) OK
Probe contact ― Good
Probe position ― It was able to find by camera of the prober
Inductance
value		 ― Ls=77nH(Very low)
Lc=Very low
5kV／nsec ( good through late)
Safety Protection
▶ For Manual probe station
For Manual probe station
▶ For Semi Auto probe station
For Semi Auto probe station
Safety specification
Shielding box for Manual prober and Semi-Auto having the gate switches.
Also, those signals are connected with tester .
When open the door, The tester's signal source will be shut down.
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사업자등록번호 : 220-86-72761대표이사 : 신동만대표전화 : 070-7872-0701팩스 : 02-2167-3801
(우)07299 서울특별시 영등포구 경인로 775 (문래동 3가, 에이스하이테크시티 3동 2층)